* Equipment model: SCS-04-HD01
* Overall machine size: approx 9300mm(L)×2350mm(W)×2700mm(H)
* Operating table height: 950 ± 50mm
* Compatible with 12inch with 8inch wafer
* Fully automatic operation, foupin-foupout
* dry in- dry out
* Stainless steel SUS316 skeleton, coated with NPP, strong and corrosion resistant
* Industrial control machine + PLC control, system stability
* Windo ws Operating system, simple and convenient * With the automatic add function
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