Vertical/Horizontal: Vertical
Single/Double: Double-Sided Plating
Wafer Type and Size: Glass wafer(6/8/12 inch),Glass Panel(310*310/510*515mm),Glass Thickness: 200um-800um
Adaptation Process: TGV metal filling, surface metallization or RDL
Metallic elements: Cu
Technical standards: Max aspect ratio:2:1-15:1
Pre- & Post-Processing(As Needed):Vacuum, Wetting, Chemical replenishment, Cleaning, Drying
Process Tank:TGV Cu-filled holes or RDL Cu (customized as needed)
Uniformity: wafer:WiW≤5% ,510*515Panel WiW≤8%
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