* Equipment model: SCS-04-HD01 

* Overall machine size: approx 9300mm(L)×2350mm(W)×2700mm(H)

* Operating table height: 950 ± 50mm 

* Compatible with 12inch with 8inch wafer

* Fully automatic operation, foupin-foupout

* dry in- dry out

* Stainless steel SUS316 skeleton, coated with NPP, strong and corrosion resistant

* Industrial control machine + PLC control, system stability

* Windo ws Operating system, simple and convenient * With the automatic add function